Title:
BODY-SHAPE INSPECTING APPARATUS
Document Type and Number:
Japanese Patent JPH05272937
Kind Code:
A
Abstract:
PURPOSE:To inspect a shape at a high speed by picking up the image of a bright/dark pattern, which is projected on a body to be inspected from the direction different from lighting, comparing the bright/dark pattern of a shape-memory body, which is stored beforehand, measuring the amount of deviation, and obtaining the difference between both bodies. CONSTITUTION:As supporting stages 1a and 1b, light projecting devices 5a and 5b and video cameras 6a and 6b, the completely same devices are arranged in the same position relationship. A shape reference body 4a and a body, whose shape is to be measured 4b, are positioned at the same position relationship with positioning guides 2a and 3a and 2b and 3b. The light projecting devices 5a and 5b project the same bright/dark pattern on the bodies 4a and 4b. The images of the bodies are picked up with the cameras 6a and 6b, respectively. The amount of deviation between the patterns is measured with a deviation-amount mearuring circuit 7. A judging circuit 8 compares the measured deviation amount with the allowance deviation amount, which is registered beforehand, and judges the pass or fail. In this method, the number of image sensings is only one time, and only the slight position deviation amount between the approximately same patterns is measured. Therefore, the inspection can be executed at a high speed.
Inventors:
Matsubara Toshiro
Application Number:
JP9597092A
Publication Date:
October 22, 1993
Filing Date:
March 24, 1992
Export Citation:
Assignee:
Nippon Steel Corporation
International Classes:
G01B11/24; G06T7/00; (IPC1-7): G01B11/24; G06F15/70
Attorney, Agent or Firm:
Takaharu Takita