Title:
マスフローコントローラ用ボディ構造
Document Type and Number:
Japanese Patent JP4589846
Kind Code:
B2
Inventors:
Toru Ikeda
Application Number:
JP2005242559A
Publication Date:
December 01, 2010
Filing Date:
August 24, 2005
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
G05D7/06; F16K27/00; G01F1/00; G01F1/36
Domestic Patent References:
| JP2005165578A | ||||
| JP2000172343A | ||||
| JP2002520554A | ||||
| JP2001517767A | ||||
| JP2000146051A | ||||
| JP2003526759A |
Attorney, Agent or Firm:
Hideo Fujimoto
Nishimura Kojo
Nishimura Kojo