Title:
ボロメータ検出器、そのような検出器を使用して赤外線を検出するための装置、およびこの検出器の製造方法
Document Type and Number:
Japanese Patent JP5143368
Kind Code:
B2
Abstract:
The detector has a bolometric membrane with a bolometric material layer (6) whose resistivity varies with the temperature. A post (3) positions the membrane and the electrical conductor with respect to a reading circuit. A thermal insulating structure (4) electrically and mechanically connects each zone to the membrane. The conductors are distributed along the two crossed and superposed networks (5A, 5B) of conducting lines (5A1- 5A4), where the network (5A) has conducting units. Independent claims are also included for the following: (1) a bolometric infrared detection device comprising bolometric detectors (2) a method for fabrication of bolometric infrared detector.
Inventors:
Michel villain
Application Number:
JP2006071648A
Publication Date:
February 13, 2013
Filing Date:
March 15, 2006
Export Citation:
Assignee:
Ulysses
International Classes:
G01J1/02; G01J5/20; H01L37/00
Domestic Patent References:
| JP10090054A | ||||
| JP2001272271A |
Foreign References:
| WO2002088648A1 | ||||
| US5760398 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro