Title:
ボロメータ
Document Type and Number:
Japanese Patent JPWO2005062394
Kind Code:
A1
Abstract:
同一基板に、抵抗の温度変化係数が正である抵抗体と、読み出し集積回路（ＲＯＩＣ）とが組み込まれて成るボロメータである。ＲＯＩＣと非常に大きな絶対値の正のＴＣＲを示す抵抗体とが同一の基板に組み込まれているので、高集積と小型化が可能である。
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Inventors:
Hideomi Koinuma
Takeshi Obata
Tsutomu Yoshitake
Toyohiro Chikyo
Liu swimming
Takeshi Obata
Tsutomu Yoshitake
Toyohiro Chikyo
Liu swimming
Application Number:
JP2005516540A
Publication Date:
July 19, 2007
Filing Date:
December 24, 2004
Export Citation:
Assignee:
NEC
National Institute for Materials Science
National Institute for Materials Science
International Classes:
H01L37/00; G01J1/02; G01J1/42; G01J5/20; H01C7/02; H01L27/16
Domestic Patent References:
| JP2001183236A | 2001-07-06 | |||
| JP2000236119A | 2000-08-29 | |||
| JP2002284529A | 2002-10-03 | |||
| JP2000095522A | 2000-04-04 | |||
| JPH1151763A | 1999-02-26 | |||
| JP2003279409A | 2003-10-02 | |||
| JP2001099705A | 2001-04-13 |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Takashi Sasaki
Shuichi Fukuda
Takashi Sasaki
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