Title:
BONDING DEVICE
Document Type and Number:
Japanese Patent JP2754118
Kind Code:
B2
Abstract:
PURPOSE: To provide a highly reliable bonding device which can cope with change in frame types to be handled rapidly and easily, speeds up work, is simple in structure, and controls operation easily.
CONSTITUTION: A frame L/F can be changed rapidly and easily by replacing a magazine M by a new one. Also, a magazine transport means 31 and magazine transport means 51, 52, 81, and 82 for supplying and collecting the magazine M for a loader/unloader 15 are provided for forming a line and speeding up operation. Furthermore, the magazine transport means 41 and a magazine transfer means are laid out so that they do not cross a bonding stage 9, etc., and the structure is simplified. Also, when delivering the magazine M onto the magazine transport means 41, means 66 and 96 for turning it into standby temporarily is provided, thus facilitating operation control. Also, the empty magazine is utilized effectively.
Inventors:
MYOSHI HIDEAKI
Application Number:
JP11984292A
Publication Date:
May 20, 1998
Filing Date:
April 15, 1992
Export Citation:
Assignee:
KAIJOO KK
International Classes:
H01L21/50; H01L21/60; (IPC1-7): H01L21/60; H01L21/50
Domestic Patent References:
| JP5291338A | ||||
| JP5932148A | ||||
| JP5994427A | ||||
| JP4245651A | ||||
| JP5131173A | ||||
| JP5052973A | ||||
| JP5174581A | ||||
| JP5355964A | ||||
| JP63287027A | ||||
| JP6262440U |
Attorney, Agent or Firm:
Shoji Hagiri