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Title:
BONDING METHOD FOR SEMICONDUCTOR LASER
Document Type and Number:
Japanese Patent JPS61121383
Kind Code:
A
Abstract:

PURPOSE: To shorten the time, and to improve accuracy by die-bonding a semiconductor laser chip by spot beams.

CONSTITUTION: AuSn 2 is evaporated to the upper section of a trapezoid 1 formed by etching Si to a mesa shape, and a semiconductor laser chip 3 is positioned at an end surface. Only the periphery of the semi-conductor laser chip 3 is heated by infrared spot beams 4, AuSn is melted, and Si is die-bonded with the laser chip. An Si sub-mount material is moved in the direction of the arrow, and the laser chips 4 are die-bonded similarly in succession. Accordingly, the bonding time can be shortened while a jig does not e-xpand by thermal expansion because the whole jig need not be heated, thus improving accuracy.


Inventors:
MURATA KAZUHISA
Application Number:
JP24312684A
Publication Date:
June 09, 1986
Filing Date:
November 16, 1984
Export Citation:
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Assignee:
SHARP KK
International Classes:
H01L21/52; H01L21/58; H01S5/00; (IPC1-7): H01L21/58; H01S3/18
Attorney, Agent or Firm:
Sugiyama Takeshi



 
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