Title:
ホウ素ドープアモルファスカーボンハードマスク及び方法
Document Type and Number:
Japanese Patent JP7025600
Kind Code:
B2
Abstract:
Described are boron-doped amorphous carbon hard masks, methods of preparing boron-doped amorphous carbon hard masks, methods of using the boron-doped amorphous carbon hard masks, and devices that include the boron-doped amorphous carbon hard masks.
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Inventors:
Ways, Agit
Bishop, Steve Edgar
Bishop, Steve Edgar
Application Number:
JP2021523034A
Publication Date:
February 24, 2022
Filing Date:
October 21, 2019
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
H01L21/3065; H01L21/336; H01L27/11556; H01L27/11582; H01L29/788; H01L29/792
Domestic Patent References:
| JP2017507477A | ||||
| JP2016517179A | ||||
| JP2014007370A | ||||
| JP2019530230A |
Foreign References:
| WO2017154407A1 | ||||
| US20150079757 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation