Title:
BRAKING DEVICE, STAGE MOVING DEVICE, WORKPIECE TREATING DEVICE, AND BRAKING METHOD
Document Type and Number:
Japanese Patent JP2010261549
Kind Code:
A
Abstract:
To solve a problem that a braking device is unsuitable for a clean environment such as a clean room because dust rises when operating the braking device in the case of using a friction brake type braking device.
This braking device 6 includes sealed containers (21, 24) filled with fluids 29; fluid moving means (22, 23) moving the fluids 29 in the containers (21, 24) interlocked with the moving of a moving body to be stopped by braking; and a fluid movement preventing means (25) preventing the movement of the fluids 29 in the containers (21, 24) when stopping the moving body.
COPYRIGHT: (C)2011,JPO&INPIT
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Inventors:
MARUTANI KENTARO
Application Number:
JP2009114251A
Publication Date:
November 18, 2010
Filing Date:
May 11, 2009
Export Citation:
Assignee:
SONY CORP
International Classes:
F16D57/06; F16D63/00
Domestic Patent References:
| JP2006319366A | 2006-11-24 | |||
| JP2004247688A | 2004-09-02 | |||
| JP2003074607A | 2003-03-12 | |||
| JP2001279953A | 2001-10-10 | |||
| JP2008296305A | 2008-12-11 | |||
| JPS52152698A | 1977-12-19 |
Attorney, Agent or Firm:
Funabashi Kuninori