Title:
ブレイク方法
Document Type and Number:
Japanese Patent JP5276736
Kind Code:
B2
Inventors:
Kazuya Maekawa
Application Number:
JP2012092804A
Publication Date:
August 28, 2013
Filing Date:
April 16, 2012
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
B28D5/00; C03B33/023; H01L21/301
Domestic Patent References:
| JP7164400A | ||||
| JP925134A |
Foreign References:
| WO2004096721A1 | ||||
| WO2008129943A1 |
Attorney, Agent or Firm:
Yoshio Kashima