To facilitate mounting of a brush to a multi-parts brush core by providing a hollow outer core part of the core with one notch to enable the compression of the core at the time the core is inserted to the hollow central part of the brush and selectively compressing the hollow outer core part so as to be inserted into the hollow central part of the brush.
The outer core part 30 of the outer part brush core is formed as a hollow cylinder of which the outside diameter is substantially fixed. The hollow cylinder has a first end 41 and a second end 42 and is provided with the one notch 31 existing at the first end 41. Pressure is acted on the notch 31 to compress the outer core 30 and to fixedly engage the second end 42 of the outer core 30 with the inner core 40. As a result, there is no more need for actual contact of a handler with the first outer core end in order to execute compression and, therefore, the possibility for the contamination of the assembly is reduced and the mounting of the brush to the core for the purpose of washing wafers is made easy.
YU YING
DAVID ANDEIIN
