Title:
BUMP PROCESSING EQUIPMENT
Document Type and Number:
Japanese Patent JP2006324397
Kind Code:
A
Abstract:
To efficiently true up the height of bumps which constitute a wafer and are formed in a device.
In the bump processing equipment having such a configuration that an imaging means 12 and a cutting means 3 operate in conjunction with each other; the imaging means 12 focuses on the top of a bump B, and with the position of the cutting means 3 at that time as the origin, the cutting means 3 is driven with the origin as the basis to cut the bump B. Since the origin is set up on the wafer-by-wafer basis, the bump can be accurately and efficiently cut by a desired quantity even if there is the variation in thickness among wafers.
Inventors:
NAMIOKA SHINICHI
Application Number:
JP2005145300A
Publication Date:
November 30, 2006
Filing Date:
May 18, 2005
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/60
Domestic Patent References:
JP2004319698A | 2004-11-11 | |||
JP2002313831A | 2002-10-25 |
Foreign References:
WO2004061935A1 | 2004-07-22 |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Kyoko Kawamura