Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
BURR-REMOVING METHOD AND DICING METHOD
Document Type and Number:
Japanese Patent JP2006041261
Kind Code:
A
Abstract:

To provide a burr-removing method which is capable of suitably removing burrs at the corner of a chip.

The burr-removing method is provided such that a processing object 50, in which a plurality of bare chips are packaged on a film is cut from a surface on a film side by a cutting blade 22 which rotates at a high speed; and after at least a film has been divided into a plurality of substantially rectangular chips 53, burrs 81, 82 produced at the corner of each chip 53 are removed. In this burr-removing method, the processing object is moved relative to the cutting blade 22 in a direction reverse to the rotating direction of the cutting blade 22 at a location where the cutting blade 22 is opposed to the processing object, and a cutting trench 72 formed by cutting is traced by the cutting blade 22, whereby the burr 82 produced at the corner is pinched between the cutting blade 22 so that each chip 53 for removal so that the burr 82 will not escape to another cutting trench 71 perpendicular to the traced cutting trench 72.


Inventors:
NARITA RYOKO
Application Number:
JP2004220437A
Publication Date:
February 09, 2006
Filing Date:
July 28, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301
Domestic Patent References:
JPH01237102A1989-09-21
JP2001077055A2001-03-23
JP2004158871A2004-06-03
JPH01310906A1989-12-15
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara