CMP device - Ifa Diamond Industrial Company, Limited

Title:

CMP device

Document Type and Number:

Japanese Patent JP6008220

Kind Code:

B2

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Inventors:

Lee
Kim, Yong Chul
Li, Juhan
Choi, Jae Kwang
Boo Jepil

Application Number:

JP2015515920A

Publication Date:

October 19, 2016

Filing Date:

June 07, 2012

Export Citation:

Assignee:

Ifa Diamond Industrial Company, Limited

International Classes:

B24B37/00; B24B49/18; B24B53/00; H01L21/304

Domestic Patent References:

Foreign References:

US7163435

Attorney, Agent or Firm:

▲吉▼川俊雄
Kana Ichikawa

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