Title:
CMPパッドコンディショナー
Document Type and Number:
Japanese Patent JP4624293
Kind Code:
B2
Inventors:
Yuichi Sugimoto
Seiya Ogata
Tetsuya Nonoshita
Seiya Ogata
Tetsuya Nonoshita
Application Number:
JP2006098474A
Publication Date:
February 02, 2011
Filing Date:
March 31, 2006
Export Citation:
Assignee:
Noritake Super Abrasive Co., Ltd.
Noritake Company Limited
Noritake Company Limited
International Classes:
B24B53/12; B24B53/017; B24D3/00; B24D3/06; H01L21/304
Domestic Patent References:
| JP2001071267A | ||||
| JP2001105327A | ||||
| JP2005219152A |
Attorney, Agent or Firm:
Hisashi Kato
Mikio Hotta
Mikio Hotta