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Title:
CVD装置
Document Type and Number:
Japanese Patent JP4650919
Kind Code:
B2
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Inventors:
Takadai
Application Number:
JP2001190398A
Publication Date:
March 16, 2011
Filing Date:
June 22, 2001
Export Citation:
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Assignee:
Canon ANELVA Corporation
International Classes:
C23C16/455; C23C16/507; H01L21/31
Domestic Patent References:
JP6260434A
JP3197684A
JP11274087A
JP2001135628A
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto



 
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