CaF2 many crystallines, a focal ring, a plasma treatment apparatus, and a manufacturing method of CaF2 many crystallines

Title:

CaF2 many crystallines, a focal ring, a plasma treatment apparatus, and a manufacturing method of CaF2 many crystallines

Document Type and Number:

Japanese Patent JP5949760

Kind Code:

B2

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Inventors:

Fujiwara Seishi
Naoho Uehara
Yuka Narukawa

Application Number:

JP2013518055A

Publication Date:

July 13, 2016

Filing Date:

May 25, 2012

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

C04B35/553; G02B1/02

Domestic Patent References:

JP2003511327A
JP2003300777A

Foreign References:

WO2003055826A1

Attorney, Agent or Firm:

Masatake Shiga
Tadashi Takahashi

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