CALIBRATION METHOD OF NON-CONTACT-TYPE THERMOMETER

Japanese Patent JP3631921

B2

PROBLEM TO BE SOLVED: To provide a method for accurately and efficiently calibrating a non- contact-type thermometer being arranged to a plurality of places where distance from the center point of an object to be measured that is rotating is different.
SOLUTION: At a ceiling part 14 of a reaction chamber, radiation thermometers 31 to 33 are arranged in the diameter direction for carrying out the feedback control of heaters 21 to 23. At the ceiling part 14, a slit-shaped window 43 is provided in the diameter direction for arranging a standard thermometer 41 on it. While the standard thermometer 41 is being moved by a ball screw 45, the temperature of objects 10 and 12 to be measured in the reaction chamber can be measured sequentially via the window 43. When the distance from the center point of the object to a measuring point by the standard thermometer 41 is matched with that from the center point to the measurement one by each of the radiation thermometers 31 to 33 while the standard thermometer 41 is being moved in the diameter direction, movement is stopped once, and the output of each of the radiation thermometers 31 to 33 is sequentially calibrated so that the measurement values of both coincide each other.

Katsuma Hiroshi
Hidenori Takahashi
Hideki Ito
Tadashi Ohashi
Toji Shuji
Katsuyuki Iwata

JP18901999A

March 23, 2005

July 02, 1999

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Toshiba Machine Co., Ltd.

G01K15/00; G01J5/00; G01J5/10; (IPC1-7): G01J5/00; G01J5/10

JP11040510A
JP6260426A
JP2000306850A

WO2000009976A1

Takehiko Suzue
Sadao Muramatsu
Atsushi Tsuboi
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai

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