Title:
CALIBRATION METHOD OF X-RAY MEASUREMENT APPARATUS
Document Type and Number:
Japanese Patent JP2023095304
Kind Code:
A
Abstract:
To dispense with prior highly accurate three-dimensional measurement of a calibration jig of an X-ray measurement apparatus.SOLUTION: A calibration method comprises: a placement step of placing on a rotary table 120 a calibration jig 102 which includes a plurality of reference objects (ball 106) and can be arranged so as to move by M standard (M≥4) or greater; a feature position calculation step of specifying a position (ball gravity center coordinates Im'(i,j)) of a feature point of a projection image of each reference object at the M standard from the output of an X-ray image detector 124 by irradiating the calibration jig 102 with X-ray 118; a transformation matrix calculation step of calculating a transformation matrix H(i) including a camera parameter A from the position of the feature point of the projection image of each reference object at the M standard and a relative position interval O(i); a parameter optimization step of optimizing the camera parameter A so as to reduce a difference E between the position of the feature point of the projection image and the relative position interval; and a center position calculation step of calculating a rotation center position Cp of the rotary table 120 by using the relative position of the feature point calculated by using the optimized camera parameter A.SELECTED DRAWING: Figure 4
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Inventors:
MIYAKURA JOTA
KON MASATO
KON MASATO
Application Number:
JP2021211114A
Publication Date:
July 06, 2023
Filing Date:
December 24, 2021
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01B15/04; G01N23/046
Attorney, Agent or Firm:
Patent Attorney Corporation MTS International Patent Office