To reduce the dangerous condition to drop a carried article by preventing a large vibration of the carried article in changing the advancing direction of a carrier in the case of conveying three-dimensionally by maintaining the attitude of the carried article.

In a three-dimensional conveyance, a cam 5 is fixed by a roller 6 for clamp to stop the vibration of a chuck 3 and a carried article 4. When a carrier 1 is moving in a bending line, the roller 6 for clamp is removed from the cam 5, and the chuck 3 and the carrier article 4 are made free in the rotating direction. Before and after the movement of the carrier 1 in the bending line is completed, the cam 5 is fixed by the roller 6 for clamp and stop the vibration of the chuck 3 and the carried article 4 again.