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Title:
CANTILEVER CONTROL DEVICE
Document Type and Number:
Japanese Patent JP3817589
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cantilever control device preventing the stop of the self-oscillation of a cantilever and the contact of the probe of the cantilever with a measuring target in an atomic force microscope. SOLUTION: In the atomic force microscope, the cantilever control device 1 is constituted of: the cantilever 10 having the probe 12; an actuator 20 for causing the self-oscillation of the cantilever 10; an oscillation speed detector 30 for detecting the oscillation speed of the cantilever 10; a displacement calculator 32 for calculating the oscillation displacement of the cantilever 10 and a controller 40 for forming a signal for driving the actuator 20. A feedback control signal S is set at (K-G×x2)×dx/dt (wherein x is the oscillation displacement of the cantilever 10, dx/dt is the oscillation speed of the cantilever 10, and both of K and G are a feedback gain of a positive value).

Inventors:
Masaharu Kuroda
Koji Yabino
Application Number:
2005-018476
Publication Date:
September 06, 2006
Filing Date:
January 26, 2005
Export Citation:
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Assignee:
National Institute of Advanced Industrial Science and Technology
University of Tsukuba
International Classes:
G01B21/30; G01Q10/04; G01Q60/24; G01Q60/32; G05D19/02
Domestic Patent References:
JP2004156959A
JP2002162334A
JP11160333A
JP2004163392A
JP8166396A
Attorney, Agent or Firm:
Tetsuya Mori
Yoshiaki Naito
Cui Shu Tetsu



 
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