PURPOSE: To make scanning measurement even of a large sample possible by fixing a membrane having piezoelectric and electrostriction characteristics onto a flexible plate while sandwiching by side electrodes thereby simplifying the element structure without imposing limitation on the material.
CONSTITUTION: A probe is subjected to repulsive force and attracting force of sample atom to cause a cantilever to bend. A membrane having piezoelectric or electrostriction characteristic is formed, along with side electrodes, on the surface at the root part of a flexible plate producing maximum stress and the membrane is subjected to maximum displacement as the probe is displaced. When piezoelectric or electrostriction material is employed in the membrane, boring can be carried out easily by means of the side electrodes and polarized charges appear on the opposite end faces of the membrane when the plate bends in parallel with the boring direction. Displacement of probe can be detected by measuring the polarized charges through the electrodes. The sensor has simple structure and can be integrated with a cantilever made of any material. Material having high piezoelectric or electrostriction constant is preferably employed in order to maximize the sensor capacity.
WATANABE SHUNJI
FUJII TORU
