Title:
CANTILEVER SENSOR, MATERIAL DETECTING SYSTEM USING THE SAME, AND MATERIAL TESTING SYSTEM
Document Type and Number:
Japanese Patent JP2009069006
Kind Code:
A
Abstract:
To provide a cantilever sensor having high measuring accuracy and reduced in size and cost.
This sensor includes a cantilever fixed to a support part at its one end and having a flow passage formed therein, a piezoelectric element constituted by a piezoelectric body and electrode parts formed on the both sides of the piezoelectric body and disposed at least on one surface of the cantilever, a driving part applying voltage to the electrode parts of the piezoelectric element to vibrate the cantilever, a detecting part detecting vibration of the cantilever from expansion and contraction of the piezoelectric element and a liquid supplying means letting a liquid flow through the flow passage in the cantilever.
Inventors:
SAKASHITA YUKIO
Application Number:
JP2007238074A
Publication Date:
April 02, 2009
Filing Date:
September 13, 2007
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
G01N5/02; B81C99/00
Domestic Patent References:
JP2005156526A | 2005-06-16 | |||
JPH05325274A | 1993-12-10 | |||
JPH02243908A | 1990-09-28 |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Haruko Sanwa