PURPOSE: To provide a cantilever which makes a collision with a displacement based on the stress by providing a stopper for entirely supporting the cantilever.
CONSTITUTION: The cantilever comprises a beam part 12 and a base part 11 where a substrate 10 is separated partially through hollow regions 13, 14. The beam part 12 cantilevers from the base part 11. A stopper is formed of a resin having tensile elasticity and comprises a variable part 31, a supporting part 32, and telescopic parts 33a-33c. The variable part 31 is formed on the beam part 12, the supporting part 32 is formed on the base part 11 while surrounding the beam part 12 through a predetermined interval, and the telescopic parts 33a-33c are formed longer than the distance between the variable part 31 and the supporting part 32 while connecting them partially. When a relatively strong stress is applied externally and the telescopic parts 33a-33c elongate to the maximum, the beam part 12 is braked and the displacement thereof is confined within a predetermined range.
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