Title:
CAPACITANCE TRANSDUCER, AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2016005209
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique which allows for relatively flexible setting of the thickness of a vibrating membrane, even if the height of a cavity in a cell of a capacitance transducer is large, while increasing the degree of design freedom of the cell structure.SOLUTION: In a method for manufacturing a capacitance transducer having a cell of a structure including a first electrode 3, and a vibration membrane including a second electrode 6 provided while sandwiching the first electrode 3 and a cavity 5, a first sacrificial layer 12 is formed on the first electrode 3. A second sacrificial layer is formed at a part corresponding to a part of the cavity 5 on the first sacrificial layer 12, and an isolating layer 11 forming a part of the vibration membrane is formed on the second sacrificial layer. The second sacrificial layer is removed through an opening 8 formed in the isolating layer 11, and then the first sacrificial layer 12 is removed.
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Inventors:
HASEGAWA YOSHIHIRO
Application Number:
JP2014125834A
Publication Date:
January 12, 2016
Filing Date:
June 18, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H04R19/00; A61B8/00; G01N29/00; G01N29/24; H04R31/00
Domestic Patent References:
| JP2006319712A | 2006-11-24 | |||
| JP2013065983A | 2013-04-11 | |||
| JP2013126070A | 2013-06-24 | |||
| JP2012222516A | 2012-11-12 | |||
| JP2014017566A | 2014-01-30 | |||
| JP2013034665A | 2013-02-21 | |||
| JP2013168810A | 2013-08-29 | |||
| JP2009503918A | 2009-01-29 |
Attorney, Agent or Firm:
Kazuo Kato
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