Title:
CAPACITANCE TYPE ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP2004226362
Kind Code:
A
Abstract:
To provide a capacitance type acceleration sensor having an improved sensor sensitivity.
The capacitance type acceleration sensor 1 comprises movable electrodes 10a, 10b integrally formed with a side surface of a spindle part 11 while stretching therefrom, and fixed electrodes 20a, 20b having detection surfaces which face to detection surfaces of the movable electrodes 10a, 10b, and detects the acceleration from the change in capacity between detection surfaces. In the sensor 1, the distance between the detection surfaces in the state where no acceleration is applied is reduced by a first electrostatic attraction force F1 generated by applying a first voltage between the movable electrodes 10a, 10b and the fixed electrodes 20a, 20b.
Inventors:
IWAKI TAKAO
YOSHIOKA TETSUO
MORISHITA TOSHIYUKI
YOSHIOKA TETSUO
MORISHITA TOSHIYUKI
Application Number:
JP2003017493A
Publication Date:
August 12, 2004
Filing Date:
January 27, 2003
Export Citation:
Assignee:
DENSO CORP
International Classes:
G01P15/125; H01L29/84; (IPC1-7): G01P15/125; H01L29/84
Attorney, Agent or Firm:
Kazuyuki Yahagi