Title:
CAPACITANCE TYPE DYNAMIC QUANTITY SENSOR
Document Type and Number:
Japanese Patent JP2005069852
Kind Code:
A
Abstract:
To obtain a capacitance type dynamic quantity sensor which can avoid occurrence of hillock on electrodes, low in costs and superior in reliability without membrane peeling of the electrode and the like.
Such a pattern as a groove and a hole is formed on a metal electrode arranged on and below a vibrator in a capacitance type dynamic quantity sensor. By this, occurrence of hillock is avoided even using a single electrode such as Al, membrane peeling of the electrode can be reduced and can attain cost reduction.
Inventors:
KATO KENJI
SUDO MINORU
SHODA MITSUO
SUDO MINORU
SHODA MITSUO
Application Number:
JP2003299517A
Publication Date:
March 17, 2005
Filing Date:
August 25, 2003
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
G01C19/56; G01C19/5719; G01P15/125; H01L29/84; G01P3/44; (IPC1-7): G01P15/125; G01P3/44; H01L29/84
Attorney, Agent or Firm:
Yoshiharu Matsushita