To greatly improve measurement precision of a capacitance type measuring device that measures a physical quantity of a measurement object by measuring the capacitance of a variable capacitor, and to make the capacitance type measuring device compact and simple in structure.
The capacitance type measuring device includes a primary measuring circuit 61 constituted including a variable capacitor 5 and a reference electric element 9 on which measurement of the capacitance of the variable capacitor 5 is based, a secondary measuring circuit 62 having an impedance conversion element having sufficiently high input impedance and connected to the primary measuring circuit 61, and a substrate 2 on which the measuring circuits 61, 62 are formed partially or wholly, a high impedance circuit part 8 and the reference electric element 9 formed between the variable capacitor 5 and impedance conversion element 7 being buried in the substrate 2 between its top surface and reverse surface.
KUWAHARA AKIRA
HATAITA TAKEHISA
IKEYAMA TOSHIHIRO
Akiko Sato
Saito Shindai