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Title:
CAPACITANCE-TYPE PRESSURE SENSOR, AND HEMADYNAMOMETER, PRESSURE MEASURING DEVICE AND GAS METER USING THE SAME
Document Type and Number:
Japanese Patent JPH0943083
Kind Code:
A
Abstract:

To provide a capacitance-type pressure sensor wherein linearity in input/output characteristics is good, the sensor is compact but highly sensitive, and a measurement range is wide.

A periphery of a diaphragm 2 is supported by a base 1, and the diaphragm 2 approximately entirely flexes like a dome with a pressure applied. A center of a movable electrode plate 10 for maintaining a flat shape is locally coupled and supported by the center of the diaphragm via a neck 11, wherein when the diaphragm 2 flexes, the movable electrode plate 10 shifts in parallel in its thickness direction, but the flat shape can be held. Thus a fixed electrode 7 placed on a glass substrate 5 faces the movable electrode plate 10 in parallel with an appropriate distance, so that even if the distance between the fixed electrode 7 and the movable electrode plate 10 varies according to the flex of the diaphragm 2, distances at respective parts are approximately equal, thereby obtaining good linearity over a wide range.


Inventors:
HARA KENTARO
Application Number:
JP21550495A
Publication Date:
February 14, 1997
Filing Date:
August 02, 1995
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
G01L13/06; A61B5/022; G01L1/14; H01L29/84; (IPC1-7): G01L13/06; A61B5/022; G01L1/14; H01L29/84
Attorney, Agent or Firm:
Shinichi Matsui



 
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