CAPACITANCE TYPE PRESSURE SENSOR AND ITS MANUFACTURE

Japanese Patent JP3728969

B2

PROBLEM TO BE SOLVED: To obtain a low-cost capacitance type pressure sensor whose characteristic and reliability are superior, the nondefective rate is high, and the number of production processes is small.
SOLUTION: This pressure sensor is constituted, in such a way that a silicon component 1a which is provided with a moving electrode part 11 surrounded by a ring-shaped groove 12, and a glass component 2 which is provided and a fixed electrode 21 are electrostatically coupled. The silicon component 1a comprises a recessed part 14, which is formed simultaneously with a gap part 13 in order to ensure the gap of a capacitor 3 constituted of both electrodes. An insulating thin film 15 is formed on the bottom face of the recessed part 14. The thin film 15 prevents a short circuit between the electrodes due burrs in the working operation of a through-hole 22, for the fixed electrode, in the glass component 2, it makes the nondefective rate of the pressure sensor to be improved, it limits the size of dust penetrating from the through-hole 22, and it enhances the reliability of the pressure sensor. Instead of the insulating thin film 15, it is effective for forming a counterbored hole in the recessed part 14, and both can be used concurrently.

JPS5831853	[Title of the Invention] Differential pressure measuring device
WO/1998/002723	IMPROVED HEATED PRESSURE TRANSDUCER ASSEMBLY
WO/1991/015742	PRESSURE SENSING CAPACITOR, AND TRANSDUCER

Katsumi Taniguchi
Noriyuki Hirayama
Tomoaki Goto
Koji Matsushita

JP5713499A

December 21, 2005

March 04, 1999

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Fuji Electric Equipment Control Co., Ltd.

G01L9/12; G01L9/00; H01L29/84; (IPC1-7): G01L9/12; H01L29/84

JP9145514A
JP9257620A
JP6201500A
JP10148593A
JP10170374A

Masaharu Shinobe

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