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Title:
CAPACITANCE TYPE PRESSURE SENSOR AND VACUUM DEGREE EVALUATION METHOD OF VACUUM CHAMBER THEREOF
Document Type and Number:
Japanese Patent JP2006300578
Kind Code:
A
Abstract:

To provide a capacitance type pressure sensor for absolute pressure measurement having higher accuracy or reliability, and an evaluation method for evaluating the degree of vacuum in a vacuum chamber thereof.

In this capacitance type pressure sensor, a movable electrode 6 displaced by a diaphragm 3 pressure and a fixed electrode 5 provided oppositely to the movable electrode 6 are provided in the vacuum chamber 4, and a capacitance between the movable electrode 6 and the fixed electrode 5 is measured, to thereby measure the pressure in the diaphragm. The pressure sensor is provided in the vacuum chamber 4 with a pair of terminals 7c, 7d for measuring the degree of vacuum to be extracted to the outside. A high voltage is applied to one of the terminals 7c, 7d for measuring the degree of vacuum, and a discharge current is measured from the other electrode, to thereby measure the degree of vacuum in the vacuum chamber 4 and evaluate the degree of vacuum.


Inventors:
SAITO HIROSHI
YASUIKE NORIYUKI
Application Number:
JP2005119270A
Publication Date:
November 02, 2006
Filing Date:
April 18, 2005
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01L9/12; G01L9/00; G01L21/34; G01L27/00; H01L29/84



 
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