Title:
CAPACITANCE TYPE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2014126502
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce the generation of a trouble such as a zero-point shift and the like by preventing a liquid (water) from intruding from an introduction part at low cost with a simple structure.SOLUTION: A plate surface is made to intersect at a right angel in the passing direction F of a measurement fluid between an introduction part 10A of the measurement fluid and a sensor diaphragm 32, and a first baffle (first stage baffle) 71 and a second baffle (second stage baffle) 72 are arranged to be opposed to each other. The first baffle 71 is arranged in the upstream side of the passing direction F of the measurement fluid than the second baffle 72, and the second baffle 72 is arranged in the downstream side of the passing direction F of the measurement fluid than the first baffle 71. Further, the first baffle 71 has an opening 71a formed in the central part only of the plate surface, and the second baffle 72 has one or more openings 72a formed in the peripheral part of the plate surface.
Inventors:
SEKINE MASASHI
ISHIHARA TAKUYA
TOCHIGI ISHIN
ISHIHARA TAKUYA
TOCHIGI ISHIN
Application Number:
JP2012284695A
Publication Date:
July 07, 2014
Filing Date:
December 27, 2012
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L19/00; G01L9/12; G01L21/00
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa
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