Title:
CAPACITANCE TYPE TRANSDUCER AND MANUFACTURING METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2018186409
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method for a sacrificial layer type CMUT in which a sacrifice layer type etching opening is sufficiently sealed while an etching rate is hardly reduced.SOLUTION: A method for manufacturing a sacrificial layer type CMUT is provided. At least a part of a side surface of a sacrifice layer forms a taper from one main surface of the sacrifice layer toward the other main surface. An etching opening portion is provided in at least a part of a region provided on the taper of the sacrificial layer out of an insulating film.SELECTED DRAWING: Figure 3
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Inventors:
MARUYAMA AYAKO
SETOMOTO YUTAKA
TSUNODA TAKAYUKI
SETOMOTO YUTAKA
TSUNODA TAKAYUKI
Application Number:
JP2017087517A
Publication Date:
November 22, 2018
Filing Date:
April 26, 2017
Export Citation:
Assignee:
CANON KK
International Classes:
H04R31/00; A61B8/14; B81B3/00; B81C1/00; H04R19/00
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa