Title:
CAPACITATIVE PRESSURE SENSOR AND CAPACITATIVE DIFFERENTIAL PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP3205325
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a capacitative pressure sensor or a capacitative differential pressure sensor that manufactures an electrode by a method being different from the silk screen printing method or sputtering.
SOLUTION: The sensor includes a substrate 1 with first and second surfaces and/or a circumference surface, and a plate-shaped first electrode 14 made of a conductive material. The plate-shaped first electrode is airtightly fixed to a cutout part being formed on the first surface with high pressure resistance and high vacuum, and includes through connection 17 that passes through the substrate and is led to the second or circumference surface from the first electrode. Furthermore, the plate-shaped first electrode includes a diaphragm 2. The diaphragm 2 is fixed to the outside of the cutout part on the substrate by a second joint material 26 along a junction, the diaphragm itself forms the second electrode or is covered by a second electrode 24 on a surface facing the first electrode, and the second electrode passes through a junction 18 for connection.
Inventors:
Wolfert Dreves
Andreas Rosberg
Elke Maria Schmid
Frank Hegner
Thomas worten
Andreas Rosberg
Elke Maria Schmid
Frank Hegner
Thomas worten
Application Number:
JP2000082457A
Publication Date:
September 04, 2001
Filing Date:
March 23, 2000
Export Citation:
Assignee:
Envek Mes-Und Regeltehinik Gesellschaft Mitt Beschlenktel Haftung Und Company
International Classes:
G01L9/12; G01L9/00; G01L13/06; (IPC1-7): G01L9/12; G01L13/06
Domestic Patent References:
| JP749277A | ||||
| JP85487A | ||||
| JP843225A | ||||
| JP63300930A |
Other References:
【文献】米国特許4227419(US,A)
Attorney, Agent or Firm:
Toshio Yano (4 outside)