Title:
Capacitive MEMS sensor
Document Type and Number:
Japanese Patent JP6330777
Kind Code:
B2
Inventors:
Akashi Teruhisa
Motohiro Fujiyoshi
Hirofumi Funabashi
Yoshiteru Omura
Shoji Hashimoto
Yoshie Ohira
Motohiro Fujiyoshi
Hirofumi Funabashi
Yoshiteru Omura
Shoji Hashimoto
Yoshie Ohira
Application Number:
JP2015202141A
Publication Date:
May 30, 2018
Filing Date:
October 13, 2015
Export Citation:
Assignee:
Toyota Central R & D Labs.
International Classes:
G01C19/5762; G01C19/5747; G01P15/08; G01P15/125; G01P15/18
Domestic Patent References:
| JP2013097139A | ||||
| JP2010112930A | ||||
| JP2002005950A | ||||
| JP2010060372A |
Foreign References:
| US20020189355 |
Attorney, Agent or Firm:
Kaiyu International Patent Office
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