Title:
CAPACITIVE CERAMIC RELATIVE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP3205327
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent actually the shift of a zero point from occurring at relative humidity which reaches the vicinity of a saturation limit.
SOLUTION: This sensor is provided with both a diaphragm 11 having a surface to which a first electrode 4 is mounted and a substrate 12. The substrate 12 comprises a hole 23 for guiding reference air from a first surface to a second surface facing the first surface. The first surface is glazed, and at least one second electrode 15 is mounted to the first surface. The substrate 12 and diaphragm 11 form a chamber 13 at their edge parts through the use of a spacer holder 20 and are soldered or brazed to each other. The chamber 13 is covered from the inside with a layer 24 made of a hydrophobic material brought about through the hole 23 after the soldering or brazing.
Inventors:
Frank Haeckner
Application Number:
JP2000180449A
Publication Date:
September 04, 2001
Filing Date:
June 15, 2000
Export Citation:
Assignee:
Envek Mes-Und Regeltehinik Gesellschaft Mitt Beschlenktel Haftung Und Company
International Classes:
G01L9/12; G01L9/00; G01L13/06; G01L19/06; (IPC1-7): G01L9/12; G01L13/06
Domestic Patent References:
| JP200046672A | ||||
| JP843225A | ||||
| JP85487A | ||||
| JP749277A | ||||
| JP674944U |
Other References:
【文献】米国特許4227419(US,A)
Attorney, Agent or Firm:
Toshio Yano (4 outside)
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