Title:
容量型力学量センサとその製造方法
Document Type and Number:
Japanese Patent JP4628018
Kind Code:
B2
Inventors:
Minoru Sudo
Mitsuo Yarita
Kenji Kato
Mitsuo Yarita
Kenji Kato
Application Number:
JP2004152492A
Publication Date:
February 09, 2011
Filing Date:
May 21, 2004
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01C19/56; G01P15/125; H01L29/84
Domestic Patent References:
| JP2002048553A | ||||
| JP2003315048A | ||||
| JP5508914A | ||||
| JP2002005950A | ||||
| JP2001349732A | ||||
| JP9196682A | ||||
| JP5333038A | ||||
| JP526901A |
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura