Title:
容量式力学量センサ装置
Document Type and Number:
Japanese Patent JP4134853
Kind Code:
B2
Abstract:
A capacitance type dynamic quantity sensor device includes a sensor chip having movable electrodes and sensor-chip side fixed electrodes disposed to confront the movable electrodes in a substrate surface horizontal direction X and a circuit chip disposed to confront the sensor chip. The movable electrodes are joined to the substrate through spring portions having degrees of freedom in the substrate surface horizontal direction X and the substrate surface vertical direction Z, so that the movable electrodes are displaceable in both the directions X and Z. A circuit-chip side fixed electrode is equipped at the site corresponding to the movable electrodes. The sensor chip and the circuit chip are electrically connected to each other through bump electrodes.
Inventors:
Keisuke Goto
Taiji Ota
Taiji Ota
Application Number:
JP2003313820A
Publication Date:
August 20, 2008
Filing Date:
September 05, 2003
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P3/44; G01C19/56; G01P15/125; G01C19/5719; G01P1/02; G01P15/00; G01P15/08; G01P15/18; H01L21/302; H01L23/58; H01L29/84; H01L31/062
Domestic Patent References:
| JP11067820A | ||||
| JP11304834A | ||||
| JP9189716A | ||||
| JP3094169A | ||||
| JP9292409A |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno