To provide a capacitive pressure detecting element which can secure good responsiveness in a high flow rate domain while maintaining sensitivity required for detecting a very small differential pressure in a low flow rate domain and, in addition, can prevent the erroneous detection of an alternating differential pressure even when in-phase pressure vibrations are impressed and a method for manufacturing the element.
A capacitive pressure detecting element is provided with a diaphragm 1 and two insulating members 4 and 5 which are bonded to both surfaces of the peripheral edge section of the diaphragm 1. The areas A1 and A2 of the diaphragm-facing end sections of pressure introducing ports 8 and 9 respectively formed through the insulating members 4 and 5 are adjusted to fall within the range of B/5-B/50 and to meet a relation (A1-A2)/B≤1/300, where B represent the area of the sensitive section 1A of the diaphragm 1.
KAIZE FUMIO
SEKIMORI YUKIMITSU
MARUNO NAOHIKO
Next Patent: AIRTIGHTNESS INSPECTION SYSTEM