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Patent Searching and Data


Title:
CAPACITIVE SENSOR
Document Type and Number:
Japanese Patent JPH06326332
Kind Code:
A
Abstract:

PURPOSE: To provide a capacitive sensor which is improved in the leading out reliability of electrodes provided on a substrate and mass productivity.

CONSTITUTION: A rectangular frame 2 in which a pressure-sensitive diaphragm section 4 is supported by a thin film-like elastically deformed section 3 is formed from a silicon wafer and a mobile electrode 5 is formed in the section 4. On the internal surface of the frame 2, the contact area of a connecting line 9 for connecting a fixed electrode 6 to an electrode pad is formed in an inverted-T shape. In addition, a cover 7 with the fixed electrode 6 is manufactured from another silicon wafer and the contact area of a leader line 8 for leading out the electrode is linearly formed on the internal surface of the cover 7. A pressure sensor 1 is manufactured by forming a metallic film having a rugged section with vertical stripes which are parallel with the wiring direction in the contact area of the lines 8 and 9 and joining the cover 7 with the frame 2 so that the lines can intersect each other in a contacting state.


Inventors:
KOIKE TOMOYUKI
Application Number:
JP13663193A
Publication Date:
November 25, 1994
Filing Date:
May 13, 1993
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
G01L9/12; G01P15/08; G01P15/125; H01L29/84; (IPC1-7): H01L29/84; G01L9/12; G01P15/125
Attorney, Agent or Firm:
Nakano Masafusa