Title:
CAPACITIVE TRANSDUCER AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2015103821
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a capacitive transducer capable of suppressing instability in vibration of a vibration film without considerably changing a time for sacrificial layer etching by providing a reinforcement part.SOLUTION: The capacitive transducer comprises a cell 101 including a vibration film including a first electrode 102 and a second electrode 106 that is formed separated from the first electrode 102 by an interval 109. The interval is formed by etching a sacrificial layer via an etching hole 107. In orthogonal projection to a surface on which the first electrode is formed, a channel 110 connecting the interval 109 and the etching hole is wider than the etching hole, and the etching hole is included within a range of the channel. A reinforcement part 108 is provided for supporting the vibration film at a position closer to the interval than the etching hole. The reinforcement part 108 is provided in such a manner that a straight line that does not overlap the reinforcement part 108 can be present in the case where the straight line connects an arbitrary point in the etching hole with an arbitrary point on a line where the channel is in contact with an outer periphery of the interval.
Inventors:
WATANABE SHINICHIRO
Application Number:
JP2013240476A
Publication Date:
June 04, 2015
Filing Date:
November 20, 2013
Export Citation:
Assignee:
CANON KK
International Classes:
H04R19/00; B81B3/00; B81C1/00; H04R31/00
Attorney, Agent or Firm:
Kazuo Kato
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