Title:
CAPACITIVE TRANSDUCER AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2018098591
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a capacitive transducer capable of restraining deterioration in transmission efficiency and reception sensitivity by restraining deterioration in membrane utilization efficiency, and a method of manufacturing the capacitive transducer.SOLUTION: A capacitive transducer includes one or more elements 104 each having a cell 101 including a structure supporting a vibration film at least including a second electrode 205 provided facing a first electrode 210 with an air gap 203 in between. The cell 101 of an element 104 is electrically connected with an adjacent cell with wiring 102 linked to the second electrode 205. The shape of the second electrode 205 in plan view viewed from above is nearly the same as the shape of the air gap 203.SELECTED DRAWING: Figure 1
Inventors:
KURASHIMA TAMAYOSHI
TORASHIMA KAZUTOSHI
MARUYAMA AYAKO
TSUNODA TAKAYUKI
SETOMOTO YUTAKA
TORASHIMA KAZUTOSHI
MARUYAMA AYAKO
TSUNODA TAKAYUKI
SETOMOTO YUTAKA
Application Number:
JP2016239924A
Publication Date:
June 21, 2018
Filing Date:
December 09, 2016
Export Citation:
Assignee:
CANON KK
International Classes:
H04R19/00; H04R31/00
Attorney, Agent or Firm:
Kazuo Kato