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Title:
CAPACITIVE TRANSDUCER, METHOD FOR MANUFACTURING THE SAME, AND OPERATING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2013043280
Kind Code:
A
Abstract:

To provide a capacitive transducer and a method for manufacturing the same and an operating method thereof.

The transducer includes: a first doping area 20; a second doping area 30 of a type opposite to that of the first doping area 20 and includes a first oscillation part 32; and a space 60 disposed between the first doping area and the first oscillation part 32. The first and second doping areas 20, 30 are integrated with each other. The first oscillation part includes a plurality of through holes 40, and a material film 50 sealing the through holes 40 is disposed on the oscillation part.


Inventors:
KIM CHE-HEUNG
Application Number:
JP2012172150A
Publication Date:
March 04, 2013
Filing Date:
August 02, 2012
Export Citation:
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Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
B81B3/00; B81C1/00; H01L29/84; H04R19/00; H04R31/00
Domestic Patent References:
JP2003158304A2003-05-30
JP2003165097A2003-06-10
JPH11103074A1999-04-13
JP2009538238A2009-11-05
JP2007067483A2007-03-15
JPH06109561A1994-04-19
JP2011524817A2011-09-08
JP2003158304A2003-05-30
JP2003165097A2003-06-10
JPH11103074A1999-04-13
Foreign References:
US20020137348A12002-09-26
US20110147864A12011-06-23
US20020137348A12002-09-26
Attorney, Agent or Firm:
Hatta International Patent Corporation