Title:
高周波（ＲＦ）および直流（ＤＣ）エネルギーを１つまたは複数の共通電極に結合させるためのキャパシタアセンブリ
Document Type and Number:
Japanese Patent JP6419842
Kind Code:
B2
Abstract:
Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
Inventors:
Johnson Carl
Wodinowski Less
Ringer Lawrence A
Ludwig Jeffrey
Wodinowski Less
Ringer Lawrence A
Ludwig Jeffrey
Application Number:
JP2016560966A
Publication Date:
November 07, 2018
Filing Date:
March 13, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/34; C23C16/458; H01L21/205; H05H1/46
Domestic Patent References:
| JP2009231687A | ||||
| JP2000252267A | ||||
| JP2001338917A | ||||
| JP2002025992A | ||||
| JP2007258239A |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki