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Title:
CAPACITOR DEVICE
Document Type and Number:
Japanese Patent JP2000269522
Kind Code:
A
Abstract:

To increase reliability in a capacitor as much as possible by a method wherein a first conductive diffusion layer formed in a semiconductor region at both sides of a gate electrode is connected to a first wiring via a contact formed thereon.

A p-type diffusion layer 10a is formed in a (p) well 6 at both sides of a gate electrode 9, and is structured so that a p-type impurity concentration is higher than the (p) well 6. Furthermore, a p-type diffusion layer 10b is formed at both sides of the gate electrode 9 forming a side wall 12, and is structured so that a p-type impurity concentration is higher than a p-type diffusion layer 10a. Furthermore, a silicide layer 18 is formed on the gate electrode 9, and is structured so that a silicide layer 16 is formed on the p-type diffusion layer 10b. Here, the first conductive diffusion layers 10a, 10b formed in the semiconductor region at both the sides of the gate electrode 9 are connected to a first wiring via a contact formed on these diffusion layers.


Inventors:
YOSHITOMI TAKASHI
EBUCHI YASUO
Application Number:
JP6731599A
Publication Date:
September 29, 2000
Filing Date:
March 12, 1999
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L27/04; H01L21/822; H01L21/8234; H01L27/06; H01L29/93; H01L29/94; (IPC1-7): H01L29/93; H01L21/822; H01L21/8234; H01L27/04; H01L27/06; H01L29/94
Attorney, Agent or Firm:
Kazuo Sato (3 others)



 
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