Title:
CAPACITOR AND MANUFACTURE OF THE SAME
Document Type and Number:
Japanese Patent JP3166746
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize a capacitor for obtaining fine capacitance with sufficient precision and satisfactory yield, and a method for manufacturing the capacitor.
SOLUTION: A lower electrode 2, a dielectric layer 3, an upper electrode 4, and a first nitride layer 5 having a function as a mask at etching the upper electrode 4 and hydrogen barrier performance are laminated on a substrate in this order. The first nitride layer 5, the upper electrode 4, and the dielectric layer 3 having functions as a mask at etching the lower electrode 2 are coated with a second nitride film 7 having hydrogen barrier performance, and they are provided with a contact hole put through the first nitride film 5 and the second nitride film 7 to extend from the surface of the upper electrode 4 to the upper part. In this case, the contact hole, the second nitride film 7, and the lower electrode 2 are coated with an insulating film 10.
Inventors:
Yukihiko Maeshima
Application Number:
JP37177098A
Publication Date:
May 14, 2001
Filing Date:
December 28, 1998
Export Citation:
Assignee:
NEC
International Classes:
H01L27/04; H01L21/02; H01L21/822; H01L21/8242; H01L21/8246; H01L27/10; H01L27/105; H01L27/108; H01L21/768; (IPC1-7): H01L27/105; H01L21/822; H01L27/04
Domestic Patent References:
| JP200022090A | ||||
| JP2000150825A | ||||
| JP2000196032A |
Attorney, Agent or Firm:
Nobuo Takahashi (3 outside)