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Title:
CAPACITOR TYPE PRESSURE CONVERTER AND CAPACITIVE PRESSURE SPECIFYING METHOD
Document Type and Number:
Japanese Patent JPS6479632
Kind Code:
A
Abstract:

PURPOSE: To capacitively specify pressure over a wide range by only using a single non-complicated converter.

CONSTITUTION: A pressure converter is separated from fluids enclosed in areas representing various fluid pressure states and has a diaphragm 9 containing a mobile conductive capacitor electrode surface and a composite capacitor device arranged in one of the areas. The capacitor device can be moved together with the diaphragm 9 in a state where a narrow interval is maintained between the device and the electrode surface of the diaphragm 9 and is composed of a flexible member which forms a first variable capacitor together with the electrode surface and a relatively rigid member that has a relatively stationary conductive electrode surface fitted to the electrode surface of the flexible member at an interval and forms a second variable capacitor. The pressure converter is constituted in such a way that the composite diaphragm device is positioned to the diaphragm 9 and the diaphragm 9 deforms the flexible member by the pressure difference between areas exceeding a prescribed range in response to the pressure difference. Therefore, pressure can be specified over a wide range.


Inventors:
RICHIYAADO EE BENSON
JIYON EE DENAA
Application Number:
JP10748788A
Publication Date:
March 24, 1989
Filing Date:
April 28, 1988
Export Citation:
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Assignee:
MKS INSTR INC
International Classes:
G01L9/00; G01L9/12; (IPC1-7): G01L9/12
Domestic Patent References:
JPS56148029A1981-11-17
JPS52126272A1977-10-22
JPS503385A1975-01-14
Attorney, Agent or Firm:
Morio Sada