Title:
CAPACITOR VARIABLE ELEMENT
Document Type and Number:
Japanese Patent JP3545923
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a capacity variable element which can be easily formed on a ceramic substrate at low costs, and which can be made compact in which large capacity change can be obtained with a low voltage, and capacitor characteristics can be prevented from being deteriorated even with 1 GHz or more frequencies.
SOLUTION: At least a lower electrode 2, dielectric thin film 3, and upper electrode 5 are successively provided on a substrate 1, and the dielectric thin film 3 is constituted so that the barium elements of barium titanate can be partially replaced with either magnesium or calcium, or both magnesium and calcium. A voltage is impressed between the lower electrode 2 and the upper electrode 5 for changing the capacity so that a capacity variable element can be constituted.
Inventors:
Sakiko Sato
Ryusuke Kita
Yoshiyuki Masuda
Noboru Otani
Ryusuke Kita
Yoshiyuki Masuda
Noboru Otani
Application Number:
JP32430997A
Publication Date:
July 21, 2004
Filing Date:
November 26, 1997
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01G7/06; (IPC1-7): H01G7/06
Domestic Patent References:
| JP3037725B2 | ||||
| JP8306865A | ||||
| JP8157215A | ||||
| JP9069589A | ||||
| JP8273978A |
Attorney, Agent or Firm:
Takaya Koike
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