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Title:
CAPACITOR WHICH USES LAMINAR BISMUTH FERROELECTRIC MATERIAL AND MANUFACTURE OF THIS CAPACITOR
Document Type and Number:
Japanese Patent JPH08306865
Kind Code:
A
Abstract:

PURPOSE: To increase the density of a capacitor element which uses ferroelectric material and reduce the driving voltage by efficiently use the residual polarization of the laminar bismuth ferroelectric material.

CONSTITUTION: A capacitor which uses laminar bismuth ferroelectric material of c-axis orientation is provided by arranging a pair of electrodes 1 which are composed of a first and second electrodes, and permitting the pair of electrodes 1 to have relative position relation that generates an electric field in a direction parallel to a substrate 3 at a part within the ferroelectric material 2. The pair of electrodes 1 are preferably arranged so as to apply the electric field in the maximum polarization direction or mainly in such direction. After forming the laminar bismuth ferroelectric material 2 of c-axis orientation, the maximum polarization direction of the film is detected, and the capacitor is provided by the manufacture that forms the pair of electrodes 1 which apply electric field mainly in this direction.


Inventors:
HASE TAKU
Application Number:
JP11283795A
Publication Date:
November 22, 1996
Filing Date:
May 11, 1995
Export Citation:
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Assignee:
NEC CORP
International Classes:
C01G33/00; C01G35/00; C30B29/30; H01G4/12; H01G7/06; H01L21/822; H01L21/8242; H01L21/8247; H01L27/04; H01L27/10; H01L27/108; H01L29/788; H01L29/792; (IPC1-7): H01L27/04; H01L21/822; C01G33/00; C01G35/00; C30B29/30; H01G4/12; H01G7/06; H01L27/108; H01L21/8242
Domestic Patent References:
JPH08249876A1996-09-27
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)