Title:
容量型差圧センサ
Document Type and Number:
Japanese Patent JP2004524545
Kind Code:
A
Abstract:
In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.
Inventors:
Frank Hegner
Dreves, Wolfeld
Rossburg, Andreas
Schmidt, Elke
Dreves, Wolfeld
Rossburg, Andreas
Schmidt, Elke
Application Number:
JP2002585910A
Publication Date:
August 12, 2004
Filing Date:
April 04, 2002
Export Citation:
Assignee:
ENDRESS + HAUSER GMBH + CO.KG
International Classes:
G01L13/06; G01L9/00; G01L13/02; (IPC1-7): G01L13/06
Attorney, Agent or Firm:
Yoshiyuki Osuga