【発明の名称】容量型圧力測定セル

Japanese Patent JP3205324

B1

The measurement cell has a ceramic base body with a concave central surface (121) having a first electrode (122) and a peripheral convex surface to form an annular surface (126), on which a ceramic membrane (5) is connected, with a peripheral wedge zone of active brazing solder (10), to form a measuring chamber. The inner surface (51) of the membrane is connected to second electrode (52) contacting the wedge zone. The measurement cell has a ceramic base body with a peripheral area (11) and a concave central surface at a first surface. The concave central surface has a first electrode electrically connected to a second surface (13) and a peripheral convex surface, which has a smooth annular surface formed at its apex. A ceramic membrane lies on the annular surface and the base body and is connected to the annular surface to form a wedge zone (91) with an active brazing solder, to form a measuring chamber (M) that is leakproof under high vacuum. The smooth inner surface of the membrane that faces the base body is connected to a second electrode that contacts the wedge zone. An Independent claim is included for a method for manufacturing the measuring cell.

JPS63304671	SEMICONDUCTOR BRIDGE CIRCUIT
JP3287902	DEVICE FOR DETECTION OF MASTER FOR STENCIL PLATE PRINTING
JPH0733980	[Title of the Invention] A measuring device for a semiconductor pressure sensor

Wolfel Dreves
Erke Schmidt
Andreas Rosberg
Frank Hegner
Thomas worten

JP2000054331A

September 04, 2001

February 29, 2000

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Envek Mes-Und Regeltehinik Gesellschaft Mitt Beschlenktel Haftung Und Company

G01L9/00; G01L13/06; G01L9/12; (IPC1-7): G01L9/12; G01L13/06

JP62167426A
JP3125937A
JP63300930A
JP3113338A
JP6507487A
JP1503084A

【文献】米国特許4186749(US,A)

Toshio Yano (3 outside)

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